1.stable quality; 2.Replace the same product of the Kalrez and sahara from Dupont; 3.FFKM compound

;  Features and Benefits:

  High temperatures capabilities  Excellent plasma resistance  Lowest particulation  Wide chemical resistance  Cost-effective

  Recommended  Processes:

  Deposition: LPCVD, CVD, APCVD, HDPCVD, PECVD, RPCVD, SACVD  Plasma etch: oxide and metal  Wet etch process   Metalization: PVD, evaporation, sputtering  Ion Implant

  Recommended Wet Processes

 Water preparation, cleaning and rinsing Etching StrippingCopper Plating

JN-575 FFKM