gas SF6
CF4≤0.03%
Air(N2+O2)≤0.03%
Humidity(H2O)≤3*10-6(-49.7°C)
Acidity(HF)≤0.2*10-6
Hydrolyzable Fluoride(HF)≤0.5*10-6
Mineral oil≤5*10-6
Purity of SF6≥99.9%
gas sf6