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Description
Parameter | Model | Quantity | ||
Size of vacuum chamber | 1200×1500 | 1 | ||
Structure of vacuum chamber | double door | |||
Puming rate | 1×105Pa~3×10-3Pa≤20min | |||
Ultimate vacuum | ≤8×10-4Pa | |||
System set | Maintain pump | 2X-30 | 2 | |
machinary pump | 2X-70 | 2 | ||
roots pump | ZLD-600 | 1 | ||
diffusion pump | KT-500 | 2 | ||
workpiece system | planet revolution and rotation(spindle quantity is eight,can custom | 8 | ||
Manner of working | PLC half automatic control or PC+PLC whole automatic control manner | |||
Working gas | Ar N2 O2 | |||
Total power | 80KW | |||
compression air | 0.4~0.8MPa | |||
Water cooling system | water pressure/water temperature: 25°C/≥0.25MPa(user custom) |
Ms Sunny Song
18660083602
LKBT vacuum coating machinery for hardware