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Sulfur hexafluoride is an inorganic compound with the formula SF6. It is a colorless, odorless, non-toxic and non-flammable gas (under standard conditions). SF6 has an octahedral geometry, consisting of six fluorine atoms attached to a central sulfur atom. It is a hypervalent molecule. Typical for a nonpolar gas, it is poorly soluble in water but soluble in nonpolar organic solvents. It is generally transported as a liquified compressed gas. It has a density of 6.13 g/L at sea level conditions, which is considerably higher than the density of air.
F6 is used in the electrical industry as a gaseous dielectric medium for high-voltage (35 kV and above) circuit breakers, switchgear, and other electrical equipment, often replacing oil filled circuit breakers (OCBs) that can contain harmful PCBs. SF6 gas under pressure is used as an insulator in gas insulated switchgear (GIS) because it has a much higher dielectric strength than air or dry nitrogen. This property makes it possible to significantly reduce the size of electrical gear. This makes GIS more suitable for certain purposes such as indoor placement, as opposed to air-insulated electrical gear, which takes up considerably more room. Gas-insulated electrical gear is also more resistant to the effects of pollution and climate, as well as being more reliable in long-term operation because of its controlled operating environment. Vacuum circuit breakers (VCBs) are displacing SF6 breakers in industry as they are safer and require less maintenance. Although most of the decomposition products tend to quickly re-form SF6, arcing or corona can produce disulfur decafluoride (S2F10), a highly toxic gas, with toxicity similar to phosgene. S2F10 was considered a potential chemical warfare agent in World War II because it does not produce lacrimation or skin irritation, thus providing little warning of exposure.
SF6 is also commonly encountered as a high voltage dielectric in the high voltage supplies of particle accelerators, such as Van de Graaff generators and Pelletrons and high voltage transmission electron microscopes.
SF6 plasma is also used in the semiconductor industry as an etchant.
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