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Thermal conductivity | Substrate thickness | Surface roughness | Surface roughness | Metallization(thin film) | Metallization(thick film) |
170w/m·k | 0.3-3.00mm | 0.6um(lapped) | 0.03um(polished) | Ti/Pt/Au,NiCrAu etc | Ag/Pd,Au,W/Ni/Au ect |
Aluminum nitride substrates have high thermal conductivity, high electric insulation, and low thermal expansion, low dielectric constant. Thermal conductivity is about ten times as high as that of alumina substrates. Thermal expansion is similar tothat of silicon. It is ideal to replace toxic Berylia (BeO).
Aluminum Nitride Substrates