Ads by Google
Pirani Capacitance Diaphragm Gauge PCG400 AND PCG410
The INFICON PCG Pirani Capacitance Diaphragm Gauge is the first vacuum gauge to combine the advantages of a ceramic capacitance diaphragm gauge and the cost effectiveness of a Pirani in one compact gauge.
In the measurement range between 100 mbar (75 Torr) and atmosphere, where heat transfer devices (such as Pirani and convection-enhanced Pirani) lose sensitivity and have a non-linear gas-type-dependent behavior, the INFICON capacitance diaphragm technology supplies accurate, gas-type-independent measurements.Available with up two integrated relays, the PCG can eliminate the need for 1/2 atm or other expensive switches.To simplify tool integration, the Pirani and CDG signal are combined into a single log/linear analog output spanning the fullrange of the gauge.
The INFICON PCG combines patented dual Pirani sensor and gas-typeindependent ceramic capacitance diaphragm technologies in an affordable, space saving gauge.
HIGHER ACCURACY
The INFICON PCG has a specified accuracy of ±2.5% of reading at atmosphere for accurate, repeatable pressure measurements not available with standard Pirani technology.
The INFICON PCG400 and PCG410 combine Pirani and capacitance diaphragm technologies for accurate and repeatable pressure measurement from 5 x 10-4 to 1500 mbar (3.8 x 10-4 to 1125 Torr).Unlike convection-enhanced Pirani gauges,the PCG can be mounted in any orientation for added flexibility in tool design.
Combonation Gague Features At A Glance
Mounts in any orientation
Fast response time on venting reduces cycle time
Fast, reliable readings without atmospheric
adjustment
Single log/linear analog output signal for easy
tool integration
Compact design saves valuable tool space
Applications:
Loadlock
Forevacuum pressure monitoring
Safety circuits in vacuum systems
General measurement and control in the
medium and rough vacuum range
Control of high vacuum ionization gauges
Specifications:
Measurement range 5 x 10-4 to 1500 mbar, (3.8 x 10-4 to 1125 Torr)
Repeatability 1 x 10-3 to 1100 mbar ±2 % of reading
Mounting orientation any
Admissible pressure, max. absolute 5 bar
Temperature Operation (ambient) +5 to +60 °C
Storage -20 to +65 °C
Bakeout at flange +80 °C
Power supply Voltage 15 to 30 VDC
Consumption, max. 2.5 W
Cable length, max. 100 m
Materials exposed to process gases AI2O3, tungsten, stainless steel, Cu, glass, NiFe, Ni, SnAg,
Internal volume KF / CF 6 cm3 / 8 cm3
Weight KF / CF 90 g / 120 g
Protection type IP 40
Pirani Capacitance Diaphragm Gauge