Ads by Google
EPI-Ready Polished Sapphire Substrate
| Crycal Materials | 99.995% High Purity Monocrystalline AL2O3 |
| Wafer Surface Orientation | C-axis(0001)offset to M(1-100)/A(11-20) 0.2°±0.05° / 0.3°±0.1° / ±0.25° |
| Diameter | 1inch/ 2inch / 2.5inch / 3inch / 4inch / 5inch / 6inch / 7inch |
| Thickness | 330um ± 15um/430um ± 10um/500um ± 10um/1000um ±10um/2000um±10um |
| Major Flat | A-axis (1 1-2 0) ± 0.2° |
| Major Flat Length | 16.0mm ± 1.0mm / 22.0mm ± 1.0mm / 32.5 ± 1.0mm / 47.5 ± 2.5mm |
| Minor | None |
| Front Surface Finish | Epi-ready polished, Ra< 0.2nm |
| Back Surface | SSP: Fine ground, Ra 0.4 to 1.0 um; DSP: Polished. |
| TTV | <15um/<10um/<10um |
| BOW | <15um/<10um/<10um |
| Warp | <15um/<10um/<10um |
| Bubble & Color | None by visual inspection in intensive light |
| Ground Boundary | None by visual inspection in fluorescent light |
| Cleanliness | Free visible contamination |
| Packaging | Packaged in a class 100 clean room environment, in cassettes of 25pcs or single fluroware, under a nitrogen atmosphere. |
| Note | R-plane (1-1 0 2), A-plane (1 1-2 0 ), and M-plane(1-1 0 0) are available; Customer's specification not listed above is also available upon request. |
sapphire substrates for epitaxy