... device: Establishment water, electricity, gas unusual acousto-optics alarm device;6. Auxiliary pumping system: A fast circulation low temperature water vapor ... , wide 3000, high 2100;3. Ultimate vacuum (new machine, idling, dry): ≤6×10-4Pa;4. Secondary recovery time (new machine, idling ... , dry): From 1×105Pa to 5×10-2Pa≤3min5. Total output: ...