Product identification Chemical name: 1,1,1,3,3,3-Hexamethyldisilazane Alias: HMDS; Hexamethyldisilazan Product identificationChemical name: 1,1,1,3,3,3 ... -Hexamethyldisilazane Alias: HMDS; HexamethyldisilazaneCAS: 999-97-3EINECS: 213-668-5 Molecular structure : Molecular ... kept in sealed container. 1,1,1,3,3,3-Hexamethyldisilazane