... .S.(max)Hysteresis: SSI: 4μm(max, 24- or 25-bit), 2μm(max, 26-bit) Modbus: 4μm(max) Analog: 0.002 ... %F.(max)Resolution: SSI: 4μm(max, 24- or 25-bit), 2μm(max, 26-bit) Modbus: 4μm(max) Analog: 16bit D ... %F.S./°CSystem resolution: SSI:1μm,2μm,5μm,10μm,20μm,50μm,100μmselectable Modbus: 4μm(max) Analog: depends on indicatedcontrollerZero range ...