Semiconductor silicon wafer used in the production of large power electric devices, such as SCR, rectifier, power module,

Product specifications            parameters

Diameter                                   2"---5"

Dia.& tolerance (mm)             X±0.2

Type/Dopant                             N-Type(NTD)

Orientation                               100 / 111

ResistivityΩ.cm                        15--1000

RRG%                                          ≤6%

Oxygen content (at cm-3 )         ≤1×1016

Carbon content (at cm-3 )          ≤2×1016

Thickness tolerance (um)         According to the customer       

TTV(um)                                   ≤5 / Or according to the customer

BOW(um)                                ≤15/ Or according to the customer

Float Zoned silicon wafer