Precision silicon micromachining

Sensitive to low flows - 0.1 sccm to 20 SLPM

Adaptable for use with higher flows

Fast response time

Analog output

Low power consumption

Repeatable response

Laser trimmed interchangeability

Accurate, cost effective flow sensing

In-line printed circuit board terminals

Standard 2.54 mm (0.100 in) mounting centers

Accurate sensing of low pressure 0.001 in to 4.0 in H2O (0.003 to 10 mbar)

•Damper control for heating, ventilation, and air conditioning systems

•Gas analyzers

•Low vacuum control

•Process control

•Medical respirators and ventilators

•Oxygen concentrators

•Leak detection equipment

•Vent hoods

•Anesthesia control

•Gas metering

•Gas chromatography