... /min, stepless variable speedVacuum systemDiffusion pump KT-600, Roots pump ZJ-300, mechanical pump 2X-70, rotary pump 2X-8, 304 ... stainless steel pipingDiffusion pump KT-800 , Roots pump ZJ-600, mechanical pump 2X-70, rotary pump 2X-8, 304 ... stainless steel pipingDiffusion pump KT-800, Roots pump ZJ-600, mechanical pump 2X-70,rotary pump 2X-25, 304 ...